Powder-proof apparatus for a PECVD reactor chamber

Details Powder-proof apparatus for a PECVD reactor chamber Powder-proof apparatus for a PECVD reactor chamber

1998-04-02

2000-07-18

Joyce, Harold

Ventilation

Workstation ventilator

Covered workbench chamber

B08B 1502

Patent

active

060899697

ABSTRACT:
A transparent powder-proof housing covers the heater block of a PECVD reactor chamber tightly, thereby to prevent from powder pollution while cleaning the interior of the reactor chamber. The transparent powder-proof housing has two outlets, one for connecting to a vacuum cleaner and the other for human operation inside the reactor chamber. The vacuum cleaner vacuums the powder dust out of the transparent powder-proof housing, thereby to largely reduce the powder pollution in a clean room and the chances to jeopardize human health.

REFERENCES:
patent: 1977386 (1934-10-01), Holes
patent: 2397731 (1946-04-01), Fowler
patent: 4505190 (1985-03-01), Fink et al.
patent: 5262578 (1993-11-01), Hall
patent: 5316794 (1994-05-01), Carlson et al.

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