Powder metallurgy sputtering targets and methods of...

Details Powder metallurgy sputtering targets and methods of... Powder metallurgy sputtering targets and methods of...

2006-05-10

2009-10-13

King, Roy (Department: 1793)

Powder metallurgy processes

Powder metallurgy processes with heating or sintering

Powder pretreatment

C419S048000, C419S049000, C419S067000, C148S237000, C148S238000, C075S244000, 42, 42

Reexamination Certificate

active

07601296

ABSTRACT:
A method of forming a sputtering target and other metal articles having controlled oxygen and nitrogen content levels and the articles so formed are described. The method includes surface-nitriding a deoxidized metal powder and further includes consolidating the powder by a powder metallurgy technique. Preferred metal powders include, but are not limited to, valve metals, including tantalum, niobium, and alloys thereof.

REFERENCES:
patent: 5242481 (1993-09-01), Kumar
patent: 5415829 (1995-05-01), Ohhashi et al.
patent: 5489367 (1996-02-01), Kubota et al.
patent: 5863398 (1999-01-01), Kardokus et al.
patent: 6217969 (2001-04-01), Takahashi et al.
patent: 6261337 (2001-07-01), Kumar
patent: 6342133 (2002-01-01), D'Couto et al.
patent: 6348113 (2002-02-01), Michaluk et al.
patent: 6521173 (2003-02-01), Kumar et al.
patent: 6589311 (2003-07-01), Han et al.
patent: 6676728 (2004-01-01), Han et al.
patent: 6887356 (2005-05-01), Ford et al.
patent: 2002/0072475 (2002-06-01), Michaluk et al.
patent: 0 665 302 (1995-01-01), None
patent: 2000/323432 (2000-11-01), None
patent: WO 00/31310 (2000-06-01), None
patent: WO 01/96620 (2001-12-01), None
International Search Report for PCT/US2004/000270 dated Nov. 12, 2004.

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