Powder beam etching method

Details Powder beam etching method Powder beam etching method

1993-10-20

1995-06-13

Kisliuk, Bruce M.

Abrading

Abrading process

Utilizing fluent abradant

451 37, 451 38, 451 75, 451102, B24C 104

Patent

active

054237130

ABSTRACT:
In a powder beam etching method, a nozzle for injecting fine particles and a work are moved relative to each other in two perpendicular directions, viz., a scanning direction and a feed pitch direction during each scanning motion. During each return scanning motion the path followed is arranged to fall in between the path of the preceding forward motion.

REFERENCES:
patent: 4044505 (1977-08-01), Meyer et al.
patent: 4272612 (1981-06-01), Oliver
patent: 4281485 (1981-08-01), Charity, III
patent: 4569720 (1986-02-01), Schmitkons et al.
patent: 4834833 (1989-05-01), Palmer
patent: 5031373 (1991-07-01), Montgomery
patent: 5197234 (1993-03-01), Gillenwater

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