Powder beam etching machine

Details Powder beam etching machine Powder beam etching machine

1993-10-12

1995-03-14

Fourson, George

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156625, 156643, 156646, C23F 102

Patent

active

053974212

ABSTRACT:
In a powder beam etching machine, a etching chamber is of a double wall type with an outer sleeve and an inner sleeve. A bowl-shaped lid is provided to an inner surface of a lid to face the inner sleeve. The flow of gas containing fine particles injected from a nozzle is deflected to be led to a suction port. Thus, any stagnation of the fine particles within the etching chamber of the powder beam etching machine is avoided and any leakage of the particles to the outside is prevented. It is possible to clean a work within the etching chamber.

REFERENCES:
patent: 5178683 (1993-01-01), Takamura

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