Potential analyzer

Details Potential analyzer Potential analyzer

1983-07-28

1985-11-19

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250310, H01J 3726

Patent

active

045544557

ABSTRACT:
A potential analyzer, suitable for use in measuring the potential of a specimen such as LSI by means of an electron beam probe, comprises a detector for detecting secondary electrons emitted from the specimen irradiated with a primary electron beam, a grid electrode disposed between the detector and the specimen, a power source for applying to the grid electrode a voltage which determines the lower limit of the energy of the secondary electrons detected by the detector, the voltage being changed within a predetermined range, and a filter circuit for averaging the output of the detector produced during a period of time in which the voltage applied to the grid electrode is changed.

REFERENCES:
patent: 3646344 (1972-02-01), Plows et al.
patent: 3714424 (1973-01-01), Weber
patent: 3760180 (1973-09-01), Weber
patent: 4134014 (1979-01-01), Neave et al.

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