Postponed ROM programming

Coating processes – Electrical product produced – Condenser or capacitor

Patent

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Details

29571, 148187, 156653, 156657, 1566591, 427 93, B05D 512, H01L 744, B44C 122, C03C 1500

Patent

active

043978878

ABSTRACT:
A process to program ROM's after the insulation, gates, and interconnect circuitry have been formed by using a contact mask to define openings at the depletion cells, which openings extend beside the gates to the sources and drain so as to allow phosphorus dopant to be diffused sideways under the gates to short out the cell.

REFERENCES:
patent: 4135289 (1979-01-01), Brews et al.
patent: 4347654 (1982-09-01), Allen et al.
patent: 4354309 (1982-10-01), Gardiner et al.

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