Post-objective scanning device

Details Post-objective scanning device Post-objective scanning device

2007-09-25

2007-09-25

Cherry, Euncha P. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S216100

Reexamination Certificate

active

10549884

ABSTRACT:
A post-objective scanning device using a rotatable polygon mirror has a correction system for achieving telecentric scanning with a well-corrected scanning spot. A mirror facet tracker is provided to obtain high radiation efficiency and optimum use of the correction system. The facet tracker may be an active device including an additional beam deflector or a passive device including a facet tracking mirror.

REFERENCES:
patent: 4213157 (1980-07-01), DeBenedictis et al.
patent: 5543825 (1996-08-01), Fisli et al.
patent: 0653877 (1995-05-01), None

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