Post-fabrication tuning of acoustic resonators

Details Post-fabrication tuning of acoustic resonators Post-fabrication tuning of acoustic resonators

1996-11-19

1998-07-14

Raevis, Robert

Measuring and testing

Instrument proving or calibrating

Apparatus for measuring by use of vibration or apparatus for...

29 2535, C25D 500

Patent

active

057807132

ABSTRACT:
A system is described that tunes the resonance frequency of a thin film acoustic resonator to a desired frequency after the resonator is fabricated. The resonator has a metal layer in an acoustic path of the resonator. The system includes a substantial vacuum reaction chamber within which the resonator is located. A heater is provided that heats the metal layer to an elevated temperature to either grow or etch the metal layer depending on a reaction gas introduced into the reaction chamber. A control circuit is also provided that controls the heater to heat the metal layer such that the thickness of the metal layer is adjusted to obtain the desired frequency after fabrication of the resonator. Methods of tuning the resonance frequency of the acoustic resonator to the desired frequency are also described.

REFERENCES:
patent: 2806966 (1957-09-01), Silver
patent: 2808523 (1957-10-01), Holmbeck
patent: 2816239 (1957-12-01), Berge
patent: 3818254 (1974-06-01), Persson
patent: 4547648 (1985-10-01), Longeway
patent: 5138214 (1992-08-01), Nakai et al.
patent: 5235135 (1993-08-01), Knecht et al.
patent: 5347138 (1994-09-01), Aqui et al.
patent: 5641391 (1997-06-01), Hunter et al.

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