Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate
2006-05-16
2006-05-16
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
C219S444100, C219S446100, C430S330000
Reexamination Certificate
active
07045260
ABSTRACT:
A system and method are described for modifying an exposure image in a radiation sensitive layer by treating the exposure image with a heterogeneous and non-uniform post exposure thermal treatment. The treatment may comprise providing different portions of the exposure feature, such as different exposure features or critical dimensions, with different thermal fluxes from a thermal modification system, such as a post exposure bake oven or hot plate configured to provide different thermal fluxes. The thermal modification system may comprise one or more adjustable spacers to adjust a radiant energy flux from a thermal energy source to the radiation sensitive layer by adjusting a separation distance between the source and the layer.
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Inomata Hiroyuki
Kurihara Masa-aki
Ohfuji Takeshi
Sasaki Shiho
Blakely , Sokoloff, Taylor & Zafman LLP
Intel Corporation
Young Christopher G.
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