Post-cleaning chamber seasoning method

Details Post-cleaning chamber seasoning method Post-cleaning chamber seasoning method

2007-10-30

2007-10-30

Meeks, Timothy (Department: 1762)

Coating processes

Interior of hollow article coating

Coating by vapor, gas, mist, or smoke

C427S249150, C427S578000

Reexamination Certificate

active

10810912

ABSTRACT:
A method for seasoning a process chamber is disclosed. The seasoning method includes providing a seasoning film on the interior surfaces of a process chamber, typically after cleaning of the chamber.

REFERENCES:
patent: 5061514 (1991-10-01), Boeglin
patent: 5629043 (1997-05-01), Inaba et al.
patent: 5811356 (1998-09-01), Murugesh et al.
patent: 5812403 (1998-09-01), Fong et al.
patent: 5824375 (1998-10-01), Gupta
patent: 5891799 (1999-04-01), Tsui
patent: 6020035 (2000-02-01), Gupta et al.
patent: 6042887 (2000-03-01), Chien et al.
patent: 6121161 (2000-09-01), Rossman et al.
patent: 6136211 (2000-10-01), Qian et al.
patent: 6274058 (2001-08-01), Rajagopalan et al.
patent: 6323119 (2001-11-01), Xi et al.
patent: 6403501 (2002-06-01), Hander et al.
patent: 6479098 (2002-11-01), Yoo et al.
patent: 6756088 (2004-06-01), Sharan
patent: 6890850 (2005-05-01), Lee et al.
patent: 6974781 (2005-12-01), Timmermans et al.
patent: 2002/0170487 (2002-11-01), Zehavi et al.
patent: 2003/0013314 (2003-01-01), Ying et al.
patent: 2003/0143410 (2003-07-01), Won et al.
patent: 2003/0220708 (2003-11-01), Sahin et al.
patent: 2005/0214454 (2005-09-01), Yang et al.
patent: 1154037 (2001-11-01), None

Affiliated with

Also associated with

Rating

Post-cleaning chamber seasoning method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Post-cleaning chamber seasoning method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Post-cleaning chamber seasoning method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3901263