Positive-working quinone diazide resist composition containing o

Details Positive-working quinone diazide resist composition containing o Positive-working quinone diazide resist composition containing o

1996-07-03

1998-02-10

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430165, 430192, 430313, 430318, G03F 7023

Patent

active

057167532

ABSTRACT:
A positive-working photosensitive composition comprises:

REFERENCES:
patent: 5338643 (1994-08-01), Kanazawa et al.

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