Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Patent
1992-01-29
1994-08-09
Carroll, J.
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
257651, 257759, 257792, H01L 2934
Patent
active
053369254
ABSTRACT:
Positive working polyamic acid photoresist compositions are disclosed having improved high resolution upon image development and exhibiting stable photosensitivity and superior dielectric performance. The compositions comprise polyamic acid condensation products of an aromatic dianhydride and an aromatic di-primary amine wherein a percentage of the diamine comprises special dissolution inhibiting monomers. The compositions may be further improved by the presence of particular supplemental additives.
REFERENCES:
patent: 4827326 (1989-05-01), Altman et al.
patent: 4927736 (1990-05-01), Mueller et al.
Brewer Terry
Cuzmar Ruth M.
Flaim Tony D.
Hawley Dan W.
Moss Mary G.
Brewer Science Inc.
Carroll J.
Peoples, Jr. Veo
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