Positive-working photosensitive mixture and photolithographic co

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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Details

430173, 430175, 430182, 430192, 430193, 430165, 430302, 430326, G03C 160, G03C 158, G03C 154

Patent

active

049295349

ABSTRACT:
A positive-working photosensitive mixture containing an o-quinone diazide and a binder is disclosed wherein the mixture contains a compound which is able to form an azo coupling with the o-quinone diazide. A copying material produced with the photosensitive mixture has a high photosensitivity and an exceptional developer resistance. The photosensitive mixture is used in reproduction technique, and also in the field of resists.

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