Positive-working photoresist composition containing purified bro

Details Positive-working photoresist composition containing purified bro Positive-working photoresist composition containing purified bro

1990-08-02

1992-04-28

Bowers, Jr., Charles L.

Joints and connections

Rod to member to side, e.g., plate, rod side, etc.

Arcuate or multiplanar side

430165, 430191, 430192, 430193, 430270, 430311, 430326, G03F 723, G03F 730, G03C 161

Patent

active

051088703

ABSTRACT:
Photoresist compositions of this invention comprise a positive photoresist polymer, preferably a novolac polymer, a photoactive component (PAC) and a broadband dye additive with high aqueous alkaline solubility and selected from a dye of the formula: ##STR1## wherein R.sub.1, R.sub.2 and R.sub.3 are each independently selected from the group consisting of hydrogen, alkyl, alkoxy, chloro, bromo and nitro moieties.

REFERENCES:
patent: 4618565 (1986-10-01), White et al.
patent: 4828960 (1989-05-01), Hertog
patent: 4882260 (1989-11-01), Kohara et al.
patent: 4965167 (1990-10-01), Salamy
T. R. Pampalone & F. A. Kuyan, Contract Enhancing Additives for Positive Photoresist, J. Electrochem. Soc.: Solid-State Science & Technology, vol. 135, No. 2, pp. 471-476 (Feb. 1988).

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