Positive-working photodefinable polyimide precursors

Details Positive-working photodefinable polyimide precursors Positive-working photodefinable polyimide precursors

1994-12-15

1996-05-14

Seidleck, James J.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From phenol, phenol ether, or inorganic phenolate

528125, 528172, 528173, 528174, 528176, 528183, 528185, 528188, 528191, 528192, 528220, 528229, 528350, 528353, 430130, 430135, 430137, 524600, 524606, 524715, 522122, 522154, C08G 7310, C08G 802, C08L 7908

Patent

active

055168752

ABSTRACT:
This invention concerns positive-working photodefinable polyimide precursors which make use of chemical amplification based on photoacid catalyzed cleavage of acid labile-poly(amic acetal esters).

REFERENCES:
patent: 5212047 (1993-05-01), Hertler et al.
Naitoh, K. et al., Journal of Photopolymer Science & Technology, 5, 339-342, 1992.
Shii, K. et al., Polymer Preprints Japan, 40, 3721, 1991.

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