Positive-working electron resists

Details Positive-working electron resists Positive-working electron resists

1973-12-12

1976-09-21

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 44, 427273, 427352, 427372, 96 362, 96 68, 20415914, 260 7841, 260874, B05D 306

Patent

active

039819850

ABSTRACT:
A cross-linkable positive resist formed from mixtures of a copolymer of an olefinically unsaturated carboxylic acid and an olefinically unsaturated compound having no free acid group and a copolymer of olefinically unsaturated acid chloride and an olefinically unsaturated compound having no acid chloride group.

REFERENCES:
patent: 3444144 (1969-05-01), Neale et al.
patent: 3445530 (1969-05-01), Alpin
patent: 3526612 (1970-09-01), Alpin
patent: 3546182 (1970-12-01), Izumi et al.

Affiliated with

Also associated with

Rating

Positive-working electron resists does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Positive-working electron resists, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Positive-working electron resists will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1413971