Positive-type photosensitive resin compositions with quinone dia

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430165, 430168, 430169, 430191, 430192, 430193, G03F 7023

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active

054016045

ABSTRACT:
A positive-type photosensitive resin composition containing a resin which results from reactions between a specific polyepoxide compound, a carboxylic acid compound having a specific phenolic hydroxyl group, a carboxylic acid compound having no specific phenolic hydroxyl group, and 1,2-quinone diazide sulfonyl halide. The resin composition has high exposure sensitivity, is capable of inhibiting swell or dissolution of unexposed areas during the stage of development, and yet retains other favorable properties. The resin composition has also attained short developing time.

REFERENCES:
patent: 4999274 (1991-03-01), Seio et al.
patent: 5055374 (1991-10-01), Seio et al.

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