Positive resist compositions

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430193, 430326, 260141, G03C 154, G03C 160

Patent

active

043979378

ABSTRACT:
Positive resists are formed from a soluble phenolic resin and a sensitizer which is a diester of a 1-oxo-2-diazonaphthalene sulfonic acid and of an unsymmetrical primary or secondary aliphatic diol which is a mixture of geometric and diastereoisomers.

REFERENCES:
patent: 2767092 (1956-10-01), Schmidt
patent: 3666473 (1972-05-01), Colom et al.
patent: 3823130 (1974-07-01), Deutsch et al.
patent: 4005437 (1977-01-01), Ross et al.
patent: 4123279 (1978-10-01), Kobayashi
patent: 4308368 (1981-12-01), Kubo et al.
Grant, Julius, "Hockh's Chemical Dictionary", 4th Ed., 1969, pp. 295, 296, 361 and 637.
Gilman, Henry, "Organic Chemistry", 2nd Ed., 1953, pp. 229 and 244-245.

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