Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1995-04-10
1998-12-01
Chu, John S.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430165, 430193, G03F 7023
Patent
active
058436162
ABSTRACT:
A positive resist composition sensitive to radiations such as ultraviolet rays, far ultraviolet rays, which comprises;
REFERENCES:
patent: 4123279 (1978-10-01), Kobayashi
patent: 5182184 (1993-01-01), Lazarus et al.
patent: 5238771 (1993-08-01), Goto et al.
patent: 5451484 (1995-09-01), Nagase et al.
Edamatsu Kunishige
Hashimoto Kazuhiko
Osaki Haruyoshi
Yoshida Yuji
Chu John S.
Sumitomo Chemical Company Ltd.
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