Positive radiation-sensitive resist composition

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430192, 430193, 430270, 430326, 430909, 522 27, G03F 7022

Patent

active

052759105

ABSTRACT:
A positive radiation-sensitive resist composition comprising an alkali-soluble resin, a radiation-sensitive ingredient and a phenol compound represented by the general formula (I): ##STR1## wherein R.sub.1, R.sub.2 and R.sub.3 independently of one another each represent a hydrogen atom, an alkyl group or an alkoxy group and n represents 1, 2 or 3.

REFERENCES:
patent: 5130225 (1992-07-01), Uetani
Abstract of Japanese Patent 3-191351.
European Search Report Dec. 22, 1992.

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