Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1992-08-15
1994-03-22
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430165, 430192, 430193, G03F 7023, G03C 161
Patent
active
052963306
ABSTRACT:
Positive photoresist compositions comprising, in an organic solvent, at least
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Knobloch Wilhelm
Munzel Norbert
Roth Martin
Schulz Reinhard
Bowers Jr. Charles L.
Ciba-Geigy Corp.
OCG Microelectronics Inc.
Teoli, Jr. William A.
Young Christopher G.
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