Pumps – Motor driven – Electric or magnetic motor
Reexamination Certificate
2006-03-14
2006-03-14
Freay, Charles G. (Department: 3746)
Pumps
Motor driven
Electric or magnetic motor
C417S413100, C417S413200, C417S307000, C417S440000, C417S441000
Reexamination Certificate
active
07011507
ABSTRACT:
A pump according to the present invention has a circular diaphragm4placed at the bottom of a casing2. At the bottom of the diaphragm4, a piezoelectric element6is installed in contact with the diaphragm4. A narrow space between the diaphragm4and the top wall of the casing2constitutes a pumping chamber8. An inlet flow path12and an outlet flow path14are open to the pumping chamber8, wherein a check valve10is installed in the inlet flow path12. Immediately downstream of the pumping chamber, the outlet flow path14has a narrow segment16. The narrow segment16of the outlet flow path has ½ the diameter and ¼ the cross sectional area of the outlet flow path14. The outlet flow path14has a return inlet22, which is connected to a return outlet23in the inlet flow path via an active valve24. The active valve24is opened and closed freely by an actuator26made of shape-memory alloy.
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Anders Olsson et al.; “An Improved Valve-Less Pump Fabricated Using Deep Reactive Ion Etching”; IEEE; 1996; pp 479-484.
Seto Takeshi
Takagi Kunihiko
Freay Charles G.
Sayoc Emmanuel
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