Positive displacement flow through fluid pump

Details Positive displacement flow through fluid pump Positive displacement flow through fluid pump

1977-05-18

1979-02-13

Freeh, William L.

Pumps

With signal, indicator, or inspection means

417472, 417430, F04B 2100, F04B 3900, F04B 4308, F04B 1500

Patent

active

041393333

ABSTRACT:
A positive displacement flow through fluid pump especially useful for dispensing exact volumes of photoresist on a silicon wafer uses a bellows for the main pumping component. The bellows is capped at both ends and they include slugs which extend into the interior of the bellows to minimize the static volume. In addition, internal porting is provided in the slugs to effectively wash or purge the convolutions of the bellows which results in continuous cleaning.

REFERENCES:
patent: 1546973 (1925-07-01), Ellis
patent: 1557878 (1925-10-01), Reeves
patent: 1580479 (1926-04-01), Frankenfield
patent: 1793513 (1931-02-01), Schneider
patent: 2231861 (1941-02-01), Adams
patent: 2840004 (1958-06-01), Guenther et al.
patent: 2960038 (1960-11-01), Lupper et al.
patent: 2978149 (1961-04-01), Rosen

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