Positive and negative ion beam merging system for neutral...

Details Positive and negative ion beam merging system for neutral... Positive and negative ion beam merging system for neutral...

2005-12-13

2005-12-13

Wells, Nikita (Department: 2883)

Radiant energy

Electrically neutral molecular or atomic beam devices and...

C250S42300F, C250S424000, C313S111000, C313S111000, C313S359100, C313S363100

Reexamination Certificate

active

06974950

ABSTRACT:
The positive and negative ion beam merging system extracts positive and negative ions of the same species and of the same energy from two separate ion sources. The positive and negative ions from both sources pass through a bending magnetic field region between the pole faces of an electromagnet. Since the positive and negative ions come from mirror image positions on opposite sides of a beam axis, and the positive and negative ions are identical, the trajectories will be symmetrical and the positive and negative ion beams will merge into a single neutral beam as they leave the pole face of the electromagnet. The ion sources are preferably multicusp plasma ion sources. The ion sources may include a multi-aperture extraction system for increasing ion current from the sources.

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