Positioning unit and positioning apparatus with at least two...

Details Positioning unit and positioning apparatus with at least two... Positioning unit and positioning apparatus with at least two...

2005-02-01

2005-02-01

Bucci, David A. (Department: 3682)

Machine element or mechanism

Mechanical movements

Reciprocating to reciprocating

C310S307000, C310S309000, C310S310000, C977S726000

Reexamination Certificate

active

06848328

ABSTRACT:
A positioning unit (1) includes an accelerating nanodrive (2), which has a resolution of at least ±10 nm, a slider (5) and a module (6, 7), which has a stationary component (6) and a component (7) movable for this purpose. The component (7) has a mass of less than 500 g and is movably supported relative to the drive (2). The slider (5) and the movable component (7) of the module (6, 7) are securely connected one to the other and the drive (2) can exert accelerations higher than 10 G.

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