Work holders – Holder mounted for movement – With plural means for changing holder positions
Patent
1984-06-18
1986-09-09
Watson, Robert C.
Work holders
Holder mounted for movement
With plural means for changing holder positions
B23Q 104
Patent
active
046104429
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
1. Technical Field
The present invention relates to a positioning table, for example, for positioning the mask of exposing devices in manufacturing semiconductors, the positioning to be done on a plane, and provides a positioning table which is low in total height, has high rigidity, and which permits exact positioning to be done, involving small backlash, and rotational movement to be made, with an arbitrary point on the movable table as the center of rotation.
2. Prior Art
The conventional positioning table is composed, particularly as shown in FIG. 1, of an x-table 2 having an x-direction straight-line guide 1, a y-table 4 having a y-direction straight-line guide 3 on the x-table 2, and a rotary table 6 having a rotary shaft 5 placed on the y-table, said tables being piled one upon another, with the movement in the x-direction provided by the drive of a motor 8 fixed on a base 7, the movement in the y-direction provided by the drive of a motor 9 fixed on the x-table, and the rotational movement provided by the drive of a motor fixed on the y-table 4.
In the aforementioned construction, the x-table 2 and the y-table 4 which move in two criss-crossing directions are piled one upon another and on them, the rotary table 6 is further superposed, thereby providing a triple stacked construction. Consequently, the total height of the positioning table is high and its rigidity low. Besides, since the rotary shaft 5 of the rotary table 6 was secured in a set position on the y-table 4, it was impossible to make the rotational movement, with an arbitrary position on the y-table 4 as the center of rotation. Further, large bearing friction in the straight line movements and the rotational movement result in large backlash, giving rise difficulty in positioning.
BRIEF SUMMARY OF THE INVENTION
The present invention provides a positioning table comprising a flat plate table, control means for making the movement of the aforementioned table on a plane, three axial feeding means each capable or reciprocal movement on a straight line and a means for controlling the directions of operation of the aforementioned three axial feeding means, the aforementioned positioning table having low total height and high rigidity and permitting exact positioning and a rotary movement, with an arbitrary position of the movable table as its center of rotation.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a partly broken away perspective view of a conventional positioning table;
FIG. 2 is a perspective view of a positioning table of a first embodiment of this invention;
FIGS. 3 and 4 are views for explanation of the same;
FIG. 5 is a view schematic exploratory of a positioning table of a second embodiment;
FIG. 6 is a schematic exploratory view of a positioning table of a third embodiment;
FIG. 7 is a schematic exploratory view of a positioning table of a fourth embodiment of this invention; and
FIGS. 8.about.10 are schematic exploratory views of the positioning table of the first embodiment of this invention in which the locations of the rollers of the positioning table of the first embodiment of this invention are altered.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
In the following, an embodiment of this invention is described with reference to the accompanying drawings: FIG. 2 shows a positioning table of an embodiment of this invention. Numeral 11 denotes a movable table; 12, base; 13, a group of balls with same diameter for so controlling the aforementioned movable table as to move on a flat surface; 14, a cage for constraining the aforementioned group of balls 13 from scattering and holding the aforementioned group of balls 13 in such a way that they can move in whatever direction, while turning; 15, an X-roller attached to one end surface of the aforementioned movable table 11, with its rotational axis held perpendicular to base 12; 16 and 17, a Y1-roller and a Y2-roller attached to an end surface of the aforementioned movable table 11 perpendicular to the end surface on which the aforementi
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patent: 4417843 (1983-11-01), Bonga
patent: 4492356 (1985-01-01), Taniguchi et al.
Oku Kenichi
Suzuki Masaki
Matsushita Electric Industrial Co Ltd.
Watson Robert C.
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