Electricity: motive power systems – Positional servo systems – With compensating features
Reexamination Certificate
2006-02-28
2006-02-28
Masih, Karen (Department: 2837)
Electricity: motive power systems
Positional servo systems
With compensating features
C318S560000, C318S567000, C318S568220
Reexamination Certificate
active
07005823
ABSTRACT:
A positioning system for moving an object to a target position is presented. In an embodiment, the system includes a first actuator configured to exert a force on the object in a first direction in response to a control current, the actuator having an actuator gain and the generated force being a function of the control current and the actuator gain, the actuator including a magnet configured to induce a magnetic field; and a coil arranged in the magnetic field, the magnet and the coil being movable relative to each other. The system also includes a power supply configured to supply the control current to the actuator in response to a control signal; and a control system configured to control the force generated by the actuator by supplying the control signal to the power supply, the control signal being adapted to the actuator gain, the gain being predetermined as a function of a parameter.
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Cox Henrikus Herman Marie
Houkes Martijn
Kamidin Ramidin Izair
Vreugdewater Patricia
ASML Netherlands B.V.
Masih Karen
Pillsbury Winthrop Shaw & Pittman LLP
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