Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-12-11
2000-11-21
Adams, Russell
Photocopying
Projection printing and copying cameras
Step and repeat
355 72, G03B 2742, G03B 2758
Patent
active
061511005
ABSTRACT:
A positioning system includes an X-Y table having a substrate holding surface for holding a substrate, the holding surface being movable in directions of X and Y axes, respectively, relative to a base table, a rotational table being rotationally movable about each of the X and Y axes and also being movable in a direction of a Z axis which is perpendicular to both of the X and Y axes, a controller for driving controlling the X-Y table and the rotational table and a storage device for storing, beforehand, information regarding rotation about the X or Y axis to be caused during motion of the X-Y table. The controller actuates the rotational table on the basis of the information stored in the storage device to correct rotation about the X or Y axis caused during motion of the X-Y table.
REFERENCES:
patent: 4648725 (1987-03-01), Takahashi
patent: 4869481 (1989-09-01), Yabu et al.
patent: 4999506 (1991-03-01), Mizusawa et al.
patent: 5015866 (1991-05-01), Hayashi
patent: 5022619 (1991-06-01), Mamada
patent: 5182615 (1993-01-01), Kurosawa et al.
patent: 5228358 (1993-07-01), Sakino
patent: 5473424 (1995-12-01), Okumura
patent: 5523843 (1996-06-01), Yamane
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5726548 (1998-03-01), Chiba et al.
patent: 5773953 (1998-06-01), Ukaji et al.
patent: 5858587 (1999-01-01), Yamane et al.
patent: 5883702 (1999-03-01), Tokunaga
Takashima Tsuneo
Yamane Yukio
Adams Russell
Canon Kabushiki Kaisha
Nguyen Hung Henry
LandOfFree
Positioning system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Positioning system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Positioning system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1263002