Positioning system

Details Positioning system Positioning system

1994-09-30

1996-08-13

Ro, Bentsu

Electricity: motive power systems

Positional servo systems

With particular motor control system responsive to the...

318563, 318625, 318651, H01L 2168, G05F 100

Patent

active

055459625

ABSTRACT:
A positioning system includes a plurality of actuators for driving an object to be positioned, a plurality of current output type amplifiers for amplifying drive signals from the actuators and for producing drive currents corresponding to the drive signals, and a plurality of acceleration sensors for detecting acceleration of the object in the neighborhood of the actuators. A feedback circuit negatively feeds back the outputs of the acceleration sensors to input sides of the amplifiers such that the actuators are driven in response to the drive currents.

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Y. Tomita, et al., "A 6-axes Motion Control Method for Parallel-Linkage-Type Fine Motion Stage", Journal of the Japan Society for Precision Engineering, vol. 58, No. 4, pp. 684-690 (1992).
N. Henmi, et al., "A Six-Degrees of Freedom Fine Motion Mechanism (2nd Report)", Journal of the Japan Society for Precision Engineering, vol. 58, No. 6, pp. 1035-1040 (1992).

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