Positioning stage having a vibration suppressor

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means

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318611, B64C 1706

Patent

active

045256594

ABSTRACT:
A first stage adapted to be moved in predetermined directions by a first driving device is provided in a machine base supported from a foundation by an intermediary of resilient means. This first stage is provided a second stage adapted to be moved in the directions at right angles to the directions of movement of the first stage by a second driving device. Upon movement of these respective stages, vibration of the machine base is excited by reaction forces exerted upon the machine base as a result of acceleration and deceleration. These reaction forces are offset by resistive forces generated by first and second force generators respectively. The first and second force generators establish an electromagnetic coupling between the foundation and the machine base. The first force generator is made to act against the first driving device, and the second force generator is made to act against the second driving device, in such manner that the first and second force generators generate forces directed in the opposite directions to and having substantially the same magnitudes as the reaction forces exerted upon the machine base by the first and second driving devices, respectively. This occurs simultaneously with energization of the corresponding driving devices and effectively suppresses vibration of the machine base.

REFERENCES:
patent: 3736880 (1973-06-01), Ross
patent: 3889164 (1975-06-01), Nishizawa
patent: 3936716 (1976-02-01), Bos
patent: 4021716 (1977-05-01), Rue
patent: 4222270 (1980-09-01), Allen
patent: 4382216 (1983-05-01), Joseph
Elgerd, Olle I., Basic Electric Power Engineering, Addison-Wesley Publ. Co., Mass., 1977, pp. 300-301.

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