Positioning stage device exposure apparatus and device manufactu

Details Positioning stage device exposure apparatus and device manufactu Positioning stage device exposure apparatus and device manufactu

1996-11-06

1997-11-11

Chen, Jose V.

Horizontally supported planar surfaces

Power driven

108 22, A47B 8500

Patent

active

056852320

ABSTRACT:
A positioning stage device capable of regulating in a wide range the rotational angle of a Z-stage supporting a suction chuck. The suction chuck is constructed integrally with the Z-stage, which is supported by a bearing so as to be movable along the Z-axis and rotatable about the Z-axis. A rotation stopper plate integral with the Z-stage is supported on both faces by bearing pads of an air bearing supported by a rotary ring, and is rotated about the Z-axis together with the air bearing by means of a motor, whereby the rotational angel of the Z-stage is regulated.

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patent: 5040431 (1991-08-01), Sakino et al.
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patent: 5170678 (1992-12-01), Wawrzyniak et al.
patent: 5239892 (1993-08-01), Sakai
patent: 5320047 (1994-06-01), Deurloo et al.

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