Positioning stage device

Details Positioning stage device Positioning stage device

2006-05-09

2006-05-09

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07042576

ABSTRACT:
A high speed, wide-range, high-accuracy positioning stage device for eliminating errors due to deterministic elements such as variation of surface machining accuracy of a bar mirror and for preventing error accumulation due to indeterminate elements such as air fluctuations when switching between laser interferometers. When an X1 laser interferometer as a first position measurement device and an X2 laser interferometer as a second position measurement device are switched, at a place at which at least two position measurement devices are activated, when a value is handed over from the X1 laser interferometer, which was activated, to the X2 laser interferometer, which is to be activated, errors due to the effect of X-bar mirror flatness and air fluctuations are found by a correction function for the X-bar mirror and/or a table and the average of the measured values, and the value of the X2 laser interferometer is corrected by a correction device such as a calculation device.

REFERENCES:
patent: 5363196 (1994-11-01), Cameron
patent: 5790253 (1998-08-01), Kamiya
patent: 5991033 (1999-11-01), Henshaw et al.
patent: 6137574 (2000-10-01), Hill
patent: 6181420 (2001-01-01), Badami et al.
patent: 6327039 (2001-12-01), de Groot et al.
patent: 6495847 (2002-12-01), Asano et al.
patent: 11-325832 (1999-11-01), None

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