Positioning stage

Details Positioning stage Positioning stage

1993-06-21

1996-03-05

Ro, Bentsu

Electricity: motive power systems

Positional servo systems

With protective or reliability increasing features

318652, 36416701, 359393, 33 1M, 269 61, G02B 2126, B23Q 1600

Patent

active

054970601

ABSTRACT:
A positioning stage wherein encoder pair means on a table which is movable on a frame by a drive and transmission system generate a signal independent of lost motion in that system so that a microprocessor can fix the position of the table in a predetermined position with respect to the frame irrespective of that lost motion.

REFERENCES:
patent: 3715645 (1973-02-01), Viret et al.
patent: 4052603 (1977-10-01), Karlson
patent: 4233740 (1980-11-01), Bunn et al.
patent: 4345836 (1982-08-01), Phillips
patent: 4447731 (1984-05-01), Kuni et al.
patent: 4568188 (1986-02-01), Weber et al.
patent: 4627009 (1986-12-01), Holmes et al.
patent: 4835704 (1989-05-01), Eichelberger et al.
patent: 4938654 (1990-07-01), Schram
patent: 5337140 (1994-08-01), Hagiwara et al.

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