Positioning method and projection exposure apparatus using the m

Details Positioning method and projection exposure apparatus using the m Positioning method and projection exposure apparatus using the m

1997-08-22

2000-07-18

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 356349, 430 22, 348 87, G03B 2754, G03B 2742, G01B 902, G03F 900

Patent

active

060914815

ABSTRACT:
A positioning method for placing an object at a required position includes the steps of illuminating a grating mark formed on the object with a light beam from a light source, forming a mark coherent image corresponding to the grating mark on the surface of an image pickup means by using .+-.n-order light (n=1, 2, 3, . . . ) of reflected and diffracted light from the grating mark and superimposing a reference coherent image of a reference mark, having different periodicity from and no interfering connection with the mark coherent image, onto the image pickup means, and selecting a spatial frequency component of a beat signal inherent in a composite video signal formed by superimposition and detecting the position of the grating mark on the basis of the phase of the spatial frequency component.

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patent: 5594549 (1997-01-01), Mori et al.
patent: 5734478 (1998-03-01), Magome et al.
patent: 5796483 (1998-08-01), Nakayama

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