Positioning method, and positioning apparatus

Details Positioning method, and positioning apparatus Positioning method, and positioning apparatus

2007-02-27

2007-02-27

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

10891037

ABSTRACT:
A positioning method that includes a step of moving a stage apparatus for supporting a workpiece or an object to be measured from an auxiliary mount to a positioning mount using a rolling guide extending from the positioning mount onto the auxiliary mount, a step of lifting the stage apparatus moved to the positioning mount using a lifting unit to extract the rolling guide, and a step of lowering the stage apparatus onto the positioning mount, from which the rolling guide is extracted, to cause the stage apparatus to abut a reference member and to position the stage apparatus, while hydrostatically supporting the stage apparatus by a hydrostatic bearing unit. A positioning apparatus for performing a positioning method is also set forth.

REFERENCES:
patent: 5280677 (1994-01-01), Kubo et al.
patent: 6408045 (2002-06-01), Matsui et al.
patent: 6639654 (2003-10-01), Binnard et al.
patent: 6644855 (2003-11-01), Sakino et al.
patent: 2004/0046294 (2004-03-01), Kubo et al.
patent: 5-109871 (1993-04-01), None
patent: 7-308834 (1995-11-01), None

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