Positioning method

Details Positioning method Positioning method

1982-09-23

1985-07-23

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250557, 356400, G01H 2186

Patent

active

045310602

ABSTRACT:
A method for positioning an object with patterns being formed thereon, employs a first device for extracting first information relative to patterns in a first region on the object, a second device for extracting second information relative to patterns from a second region including the first region on the object, an operating circuit to calculate a degree of coincidence between the first information and the second information, and a detecting circuit for detecting a position of the first region in the second region, whereby the position of the object can be reproduced with high reproducibility in accordance with the position as detected.

REFERENCES:
patent: 3989385 (1976-11-01), Dill et al.
patent: 4238780 (1980-12-01), Doemens
patent: 4259724 (1981-03-01), Sugiyama
patent: 4318003 (1982-03-01), Ono et al.
patent: 4395125 (1983-07-01), Kaneko et al.
patent: 4423959 (1984-01-01), Nakazawa et al.
patent: 4459021 (1984-07-01), Blazek

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