Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-03-06
2007-03-06
Schuberg, Darren (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S090500, C310S051000, C355S072000, C355S075000, C384S107000
Reexamination Certificate
active
10898444
ABSTRACT:
The present invention provides a positioning mechanism and an exposure apparatus that can be used in a vacuum ambience and has a damping function with small degassing and small dust creation. A positioning mechanism according to the present invention, when used with first and second members, serve to position the second member with respect to the first member, wherein the positioning mechanism include a positioning portion capable of relatively positioning the second member relative to the first member, and an attenuating material provided at least at a portion of a periphery of the positioning portion.
REFERENCES:
patent: 5438174 (1995-08-01), Slade
patent: 6029959 (2000-02-01), Gran et al.
patent: 6129185 (2000-10-01), Osterberg et al.
patent: 6327026 (2001-12-01), Wakui
patent: 6688439 (2004-02-01), Bhattacharya et al.
patent: 6888620 (2005-05-01), Lee et al.
patent: 2001/0052970 (2001-12-01), Sato
patent: 2006/0012258 (2006-01-01), Sun et al.
patent: 55112440 (1980-08-01), None
patent: 11-044834 (1999-02-01), None
patent: 11-233039 (1999-08-01), None
Fuse Naoto
Ito Hiroshi
Mizuno Makoto
Aguirrechea J.
Morgan & Finnegan , LLP
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