Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reissue Patent
2002-11-12
2009-06-23
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000, C355S075000
Reissue Patent
active
RE040774
ABSTRACT:
A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
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Wittekoek, S., “Optical Lithography: Present Status and Continuation Below 0.25 μm,”Microcircuit Engineering Conference, Maastrict, The Netherlands, Sep. 1993.
van Dijk Cornelis D.
van Eijk Jan
van Engelen Gerard
van Kimmenade Johannes M. M.
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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