Positioning device using Lorentz forces

Details Positioning device using Lorentz forces Positioning device using Lorentz forces

1993-03-02

1994-07-05

Shoop, Jr., William M.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318653, 318 38, G05B 106

Patent

active

053270606

ABSTRACT:
A positioning device includes a table (5, 69), which is displaceable in two coordinate directions (X, Y) by means of Lorentz forces of electric linear motors over a base (3) and is guided over the base (3) by means of a static gas bearing, which has an air gap thickness independent of the coil systems and magnet systems (15-21, 37-43) in the motors. The positioning device is particularly suitable for the manufacture of masks with patterns for integrated circuits.

REFERENCES:
patent: 4485339 (1984-11-01), Trost
patent: 4506204 (1985-03-01), Galburt
patent: 4506205 (1985-03-01), Trost et al.
patent: 4507597 (1985-03-01), Trost
patent: 4628238 (1986-12-01), Smulders et al.
patent: 4952858 (1990-08-01), Galburt
Buckley et al, "Step and Scan: A systems overview of a new lithography tool", SPIE, vol. 1088, Optical/Laser Microlithography II (1989) pp. 424-433.

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