Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Patent
1974-02-13
1976-04-13
Hix, L. T.
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
29203P, 33174TA, 118503, 219121L, 269 20, 269 89, 269 97, 269107, 269156, 269296, 269319, 269321H, 354 4, 355 53, G03B 2758
Patent
active
039500950
ABSTRACT:
A flat rectangular workpiece, such as a photographic plate in a photo-repeating apparatus designed to produce integrated-circuit masks, laterally overhangs a platform of a carriage which is slidable on a mobile supporting table. The platform has two end stops and a side stop defining the relative position of the workpiece thereon, the overhanging edges of the workpiece entering between upper and lower jaws of three grippers -- one on one side and two on the other -- when the carriage is slid into a working position. The lower gripper jaws, constituted by spring-loaded plungers normally held down by suction, are then released to lift the workpiece off the platform while clamping it against the overlying upper jaws. Manual retraction of a stop screw, bearing upon a fixed abutment on the supporting table, causes a limited further advance of the carriage under the force of a carriage-borne magnet coacting with the abutment; this movement results in withdrawal of the side stop, through a camming mechanism, even as the end stops disengage the clamped workpiece so that the latter thereafter has no contact with the carriage.
REFERENCES:
patent: 2974579 (1961-03-01), Echelson et al.
patent: 3563468 (1971-02-01), Baggaley et al.
patent: 3752589 (1973-08-01), Kobayashi
patent: 3775644 (1973-11-01), Cotner et al.
patent: 3809860 (1974-05-01), Diepeveen
patent: 3858982 (1975-01-01), Meckler
"Wafer Holder," IBM Technical Disclosure Bulletin; Dec., 1970, p. 1791.
"Mask-to-Mask Alignment and Copying," IBM Technical Disclosure Bulletin; Nov., 1973, p. 1977.
"Wafer Position," IBM Technical Disclosure Bulletin, May, 1975, p. 3577.
Bouygues Jean
Gerard Rene
"Thomson-CSF"
Dubno Herbert
Hix L. T,.
Hutchison Kenneth C.
Ross Karl F.
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