Positioning device, exposure apparatus using the positioning...

Details Positioning device, exposure apparatus using the positioning... Positioning device, exposure apparatus using the positioning...

2006-11-07

2006-11-07

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C250S491100, C310S010000, C310S012060, C318S649000

Reexamination Certificate

active

07133115

ABSTRACT:
A positioning device for positioning an object includes a movable member movable in X and Y directions, a top plate, disposed above the movable member, for mounting the object, at least four driving units, disposed between the top plate and the movable member, for driving the top plate with respect to the movable member in a Z direction, a position measuring unit for measuring positions of the top plate in the X and Y directions, and a controller for selecting three of the driving units based on an output from the position measuring unit. Another positioning device includes a movable member, a top plate, a driving unit for driving the top plate with respect to the movable member, a measuring unit for measuring a position of the top plate at an elastic mode node, and a controller for controlling the driving unit based on output from the measuring unit.

REFERENCES:
patent: 5909272 (1999-06-01), Osanai et al.
patent: 5939852 (1999-08-01), Akutsu et al.
patent: 6008882 (1999-12-01), Ito et al.
patent: 6028376 (2000-02-01), Osanai et al.
patent: 6359679 (2002-03-01), Ito et al.
patent: 6714842 (2004-03-01), Ito
patent: 6742393 (2004-06-01), Ito
patent: 2004/0164253 (2004-08-01), Ito
patent: 2001-230177 (2001-08-01), None

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