Positioning device

Details Positioning device Positioning device

1986-06-26

1987-10-06

Shoop, Jr., William M.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318687, 318135, G05B 106

Patent

active

046985751

ABSTRACT:
A positioning device comprising a first and a second support (9, 11) which are interconnected by a parallelogram mechanism of elastically deformable rods (17), the first and the second support (9, 11) together being displaceable in horizontal planes with a maintained position of the first support (9) in vertical direction, while with a maintained position of the first support (9) in a horizontal plane that support (9) is displaceable in vertical direction by means of a substantially frictionless relative displacement in horizontal direction of the second support (11) with respect to the first support (9).
The positioning device is particularly suitable for displacements of an object in the submicron range, such as, for example, in optical lithographic devices.

REFERENCES:
patent: 4506204 (1985-03-01), Galburt
patent: 4506205 (1985-03-01), Tront et al.
patent: 4507597 (1985-03-01), Tront
patent: 4509002 (1985-04-01), Hollis, Jr.
patent: 4525852 (1985-06-01), Rosenberg
"DeConstructeur", magazine article of Oct. 1983, No. 10, pp. 84-87.

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