Positioning device

Details Positioning device Positioning device

1996-01-30

1998-02-17

Nguyen, Hoang

Expansible chamber devices

Bellows type expansible chamber

Expansible chamber formed by concentric bellows

92 88, 92122, 92117A, 92DIG2, F01B 1900, F01B 2900, F01C 900

Patent

active

057181608

ABSTRACT:
A positioning device having a high rigidity and smooth positioning characteristics. The positioning device holds a piston formed integrally with a table within a cylinder and has pressure-adjusting elements in two pressurizing chambers in the cylinder partitioned with the piston. A gas is ejected into a clearance between the piston and the cylinder to hydrostatically support the piston. The emitted gas is introduced into the two pressurizing chambers to drive the piston and the table by the pressure difference between the pressurizing chambers. The pressure-adjusting elements include nozzles for emitting the gas in the pressurizing chambers and pressure-adjusting bodies for changing the opening degree of the ejecting port of the nozzles.

REFERENCES:
patent: 2627876 (1953-02-01), Goddard
patent: 3110228 (1963-11-01), Shramo et al.
patent: 4045958 (1977-09-01), Wells
patent: 5014602 (1991-05-01), Iwata
patent: 5040332 (1991-08-01), Aquilina
patent: 5218896 (1993-06-01), Furukawa
patent: 5507218 (1996-04-01), Lipinski

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