Positioning device

Details Positioning device Positioning device

1993-06-02

1995-08-01

Anderson, Bruce C.

Radiant energy

Ion generation

Methods

250306, 73105, H01J 3720

Patent

active

054382068

ABSTRACT:
Three point contact legs are provided on the bottom of a housing of a probe head for sliding on a surface of a sample to be observed or on a sliding surface provided in the vicinity of the sample. The housing is held by a thin plate spring which is provided in a manner to be parallel with the surface of the sample. The sample or probe head is driven by an X-Y drive unit for positioning the relative position of the probe to the sample.

REFERENCES:
patent: 4447731 (1984-05-01), Kuni et al.
patent: 4516029 (1985-05-01), Tucker
patent: 4785177 (1988-11-01), Besocke
patent: 4837445 (1989-06-01), Nishioka et al.
patent: 4877957 (1989-10-01), Okada et al.
patent: 4891526 (1990-06-01), Reeds
patent: 5103095 (1992-04-01), Elings et al.
patent: 5286977 (1994-02-01), Yokoyama et al.
Catalogue of Nanoscope II by Digital Instruments, Inc.

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