Positioning control method

Electricity: motive power systems – Positional servo systems

Reexamination Certificate

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Details

C318S135000, C318S611000, C318S649000

Reexamination Certificate

active

06975086

ABSTRACT:
A pre-compensator is provided based on a definition of abase vibration model having a motor transfer function1for generating motor displacement12from an input that is the sum of input torque and a table propelling force10multiplied with a reducer and Cartesian-to-polar coordinate transformation constant14, a table transfer function14for multiplying a deviation11between an output that is the motor displacement multiplied with a reducer and polar-to-Cartesian coordinate transformation constant2and table displacement with a table-displacement-to-force conversion spring constant3to generate the table propelling force10and to output table displacement7, and a base driving transfer function5for generating base displacement by multiplying base displacement9with a base-displacement-to-force conversion spring coefficient6and inputting the same with the table propelling force, table displacement8being generated from a difference between the table displacement and the base displacement.

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