Positioning apparatus used in a process for producing...

Details Positioning apparatus used in a process for producing... Positioning apparatus used in a process for producing...

2005-03-22

2005-03-22

Mehta, Bhavesh M. (Department: 2625)

Image analysis

Applications

Manufacturing or product inspection

C250S559300, C250S492200, C348S087000, C348S095000

Reexamination Certificate

active

06870952

ABSTRACT:
The Xray irradiation device1issues Xrays to board mark7and projects the image of the board mark7on the fluorescence screen3, the fluorescence face39of which visibly displays the image of the board mark7that can be captured by the CCD camera2. The CCD camera2images the board mark7and the mask mark5depicted on the photo mask4overlapping together. The board6and the photo mask4are aligned by exposure stage8so as to the board mark7and the mask mark5coincide.

REFERENCES:
patent: 3984680 (1976-10-01), Smith
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4504727 (1985-03-01), Melcher et al.
patent: 4614431 (1986-09-01), Komeyama
patent: 5028520 (1991-07-01), Ito
patent: 5111406 (1992-05-01), Zachman et al.
patent: 6256364 (2001-07-01), Toth et al.

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