Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Patent
1994-03-02
1996-06-11
Lorence, Richard M.
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
108 20, 108141, 384113, 384279, 384902, 7449008, H01L 2168, B23Q 1600
Patent
active
055245021
ABSTRACT:
A base board supported on an X-Y stage or the like of an exposure apparatus includes a cylindrical fixed member. Porous pads held on the fixed member support the inner circumferential surface of a guide member provided as one body with a holding member for holding a wafer in a non-contact state. The base board is rotated around its central axis by a .theta. linear motor, and is reciprocated in the vertical direction by Z linear motors provided at an equal interval in the circumferential direction. Each of the Z linear motors and the .theta. linear motor includes a rotor fixed to the holding board, and a stator that includes a coil fixed to the base board.
REFERENCES:
patent: 4006645 (1977-02-01), Newell
patent: 4656951 (1987-04-01), Kimura et al.
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5163651 (1992-11-01), Matsumoto
patent: 5239892 (1993-08-01), Sakai
patent: 5280677 (1994-01-01), Kubo et al.
Canon Kabushiki Kaisha
Lorence Richard M.
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