Positioning apparatus including a hydrostatic bearing for spacin

Details Positioning apparatus including a hydrostatic bearing for spacin Positioning apparatus including a hydrostatic bearing for spacin

1994-03-02

1996-06-11

Lorence, Richard M.

Machine element or mechanism

Control lever and linkage systems

Multiple controlling elements for single controlled element

108 20, 108141, 384113, 384279, 384902, 7449008, H01L 2168, B23Q 1600

Patent

active

055245021

ABSTRACT:
A base board supported on an X-Y stage or the like of an exposure apparatus includes a cylindrical fixed member. Porous pads held on the fixed member support the inner circumferential surface of a guide member provided as one body with a holding member for holding a wafer in a non-contact state. The base board is rotated around its central axis by a .theta. linear motor, and is reciprocated in the vertical direction by Z linear motors provided at an equal interval in the circumferential direction. Each of the Z linear motors and the .theta. linear motor includes a rotor fixed to the holding board, and a stator that includes a coil fixed to the base board.

REFERENCES:
patent: 4006645 (1977-02-01), Newell
patent: 4656951 (1987-04-01), Kimura et al.
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5163651 (1992-11-01), Matsumoto
patent: 5239892 (1993-08-01), Sakai
patent: 5280677 (1994-01-01), Kubo et al.

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