Positioning apparatus having the interferometer and acceleromete

Details Positioning apparatus having the interferometer and acceleromete Positioning apparatus having the interferometer and acceleromete

1996-04-10

1997-11-11

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356399, G01B 902

Patent

active

056869916

ABSTRACT:
A positioning apparatus includes a stationary portion, a movable portion, a position measuring device, an accelerometer, and a controller. The movable portion is movably mounted on the stationary portion. The acceleration of the movable portion causes vibration of the stationary portion. The position measuring device is fixed to the stationary portion, measures the position of the movable portion, and produces a position signal representative thereof and representative of the position of the stationary portion with respect to the movable portion when the stationary portion is vibrating. The accelerometer is fixed to the stationary portion and measures the acceleration of the stationary portion and produces an acceleration signal representative thereof. The controller feeds back measured values of the position measuring device and the accelerometer to the movable portion to move and position the movable portion to a predetermined target position. The position measuring device and the accelerometer are positioned on the stationary portion such that the position signal is in phase with the acceleration signal.

REFERENCES:
patent: 4659225 (1987-04-01), Takahashi
patent: 5151749 (1992-09-01), Tanimoto et al.

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