Positioning apparatus, exposure apparatus, and semiconductor...

Details Positioning apparatus, exposure apparatus, and semiconductor... Positioning apparatus, exposure apparatus, and semiconductor...

2006-06-20

2006-06-20

Duda, Rina (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C318S567000, C318S568120, C318S568220, C318S560000, C318S574000, C414S935000, C414S940000, C414S941000

Reexamination Certificate

active

07064512

ABSTRACT:
A positioning apparatus includes an X stage, a linear motor (X-axis) which drives the X stage along the X-axis, a linear motor (Y-axis) which drives a Y stage along the Y-axis, a laser interferometer which detects position information of the stages along the X and Y directions, and a controller which controls the linear motor (X-axis) and linear motor (Y-axis) based on a detection result of the laser interferometer. The controller controls the linear motor (Y-axis) based on the position information of the stages along the X direction detected by the laser interferometer, so as to cancel a force generated along the Y-axis by the linear motor (X-axis) when the linear motor (X-axis) is to drive the stage in the X direction.

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