Optics: measuring and testing – Position or displacement
Reexamination Certificate
2007-05-22
2007-05-22
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Position or displacement
C355S053000
Reexamination Certificate
active
10798812
ABSTRACT:
The present invention provides a positioning apparatus capable of performing six-axis micro adjustment of an optical element in an exposure apparatus with high accuracy, and the exposure apparatus. The positioning apparatus of the present invention includes a first measurement unit for measuring a position/inclination of a moving part having an optical element while being kept from contact with the moving part, and a driving unit capable of driving the moving part in directions of six axes with respect to a fixed part while being kept from contact with the moving part, based on the result of measurement by the first measurement unit.
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Inoue Mitsuru
Mizuno Makoto
Nawata Ryo
Lauchman Layla G.
Morgan & Finnegan , LLP
Underwood J.
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